Plasma Parameters Controlled by a Movable Ion Sheath

Resumo

It is shown that plasma parameters, such as the electron density, electron temperature, and plasma potential, in multidipole discharge plasma can be controlled by a negatively biased movable metal plate. Here, plasma is produced in the target region by a flux of energetic electrons coming from the source region of a double plasma device. Further, the thickness of the ion sheath formed in front of the biased metal plate varies depending on its axial position inside the cage.