Electrical Characteristics of Capacitive Coupled Radio Frequency Discharges in Argon and Hydrogen

详细

A symmetric radio frequency (RF) (13.56 MHz) electrode discharge system with different geometry has been investigated at low pressure. All electrical properties of symmetric capacitive RF discharge in pure argon (Ar) and pure hydrogen (H₂) have been obtained from the current and voltage waveforms. Here, the changes of voltage and current were investigated according to external electrical discharge parameters. The electron densities of these discharges were measured with a single Langmuir probe. A homogeneous model of capacitive coupled RF (CCRF) discharge was used to determine the electrical properties of a parallel-plate RF discharge system and their dependences on the input RF power and gas pressure .