Email this article Erratum to: Investigation of the Helicon Discharge Plasma Parametersin a Hybrid RF Plasma System
- Authors: Aleksandrov A.F.1, Petrov A.K.1, Vavilin K.V.1, Kralkina E.A.1, Neklyudova P.A.1, Nikonov A.M.1, Pavlov V.B.1, Ayrapetov A.A.2, Odinokov V.V.2, Sologub V.A.2, Pavlov G.Y.2
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Affiliations:
- Faculty of Physics
- Research Institute of Precision Engineering
- Issue: Vol 43, No 12 (2017)
- Pages: 1208-1208
- Section: Erratum
- URL: https://journals.rcsi.science/1063-780X/article/view/186342
- DOI: https://doi.org/10.1134/S1063780X17130013
- ID: 186342
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Abstract
The following must be added at the end of Acknowledgments:
The study by JSC Research Institute of Precision Machine Manufacturing was supported by the Ministry of Education and Science of the Russian Federation, Agreement no. 14.576.21.0021 dated June 30, 2014. The unique identifier of this applied research project is RFMEF157614X0021.
About the authors
A. F. Aleksandrov
Faculty of Physics
Email: alpetrov57@gmail.com
Russian Federation, Moscow, 111991
A. K. Petrov
Faculty of Physics
Author for correspondence.
Email: alpetrov57@gmail.com
Russian Federation, Moscow, 111991
K. V. Vavilin
Faculty of Physics
Email: alpetrov57@gmail.com
Russian Federation, Moscow, 111991
E. A. Kralkina
Faculty of Physics
Email: alpetrov57@gmail.com
Russian Federation, Moscow, 111991
P. A. Neklyudova
Faculty of Physics
Email: alpetrov57@gmail.com
Russian Federation, Moscow, 111991
A. M. Nikonov
Faculty of Physics
Email: alpetrov57@gmail.com
Russian Federation, Moscow, 111991
V. B. Pavlov
Faculty of Physics
Email: alpetrov57@gmail.com
Russian Federation, Moscow, 111991
A. A. Ayrapetov
Research Institute of Precision Engineering
Email: alpetrov57@gmail.com
Russian Federation, Panfilovskii pr. 10, Zelenograd, Moscow, 124460
V. V. Odinokov
Research Institute of Precision Engineering
Email: alpetrov57@gmail.com
Russian Federation, Panfilovskii pr. 10, Zelenograd, Moscow, 124460
V. A. Sologub
Research Institute of Precision Engineering
Email: alpetrov57@gmail.com
Russian Federation, Panfilovskii pr. 10, Zelenograd, Moscow, 124460
G. Ya. Pavlov
Research Institute of Precision Engineering
Email: alpetrov57@gmail.com
Russian Federation, Panfilovskii pr. 10, Zelenograd, Moscow, 124460
