Cluster Model of the Mechanism of Sensitivity of Gas Sensors Based on MIS Structures

A. V. Litvinov; N. N. Samotaev; M. O. Etrekova; Yu. A. Klishin; N. A. Korolev

doi:10.1134/S1063778819110115

Cluster Model of the Mechanism of Sensitivity of Gas Sensors Based on MIS Structures

Авторы: Litvinov A.V.¹, Samotaev N.N.¹, Etrekova M.O.¹, Klishin Y.A.¹, Korolev N.A.¹
Учреждения:
1. National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Выпуск: Том 82, № 11 (2019)
Страницы: 1499-1502
Раздел: Engineering Design of Nuclear Physics Equipment
URL: https://journals.rcsi.science/1063-7788/article/view/195864
DOI: https://doi.org/10.1134/S1063778819110115
ID: 195864

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Аннотация

A cluster model of the mechanism of sensitivity to gases is proposed, according to which the change in the electric capacity of a MIS sensor under the action of gas is caused by a change in the dielectric constant of the metal — dielectric transition layer under the action of gas molecules. The dielectric constant of the transition layer changes due to the rearrangement of the electronic structure of the traps.