Enviar artigo por via de e-mail Laser Micromilling Technology as a Key for Rapid Ceramic MEMS Devices
- Autores: Oblov K.Y.1, Samotaev N.N.1, Etrekova M.O.1, Gorshkova A.V.1
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Afiliações:
- National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
- Edição: Volume 82, Nº 11 (2019)
- Páginas: 1508-1512
- Seção: Engineering Design of Nuclear Physics Equipment
- URL: https://journals.rcsi.science/1063-7788/article/view/195869
- DOI: https://doi.org/10.1134/S1063778819110152
- ID: 195869
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Resumo
The flexible laser micromilling technology for ceramic MEMS production of microhotplates in the surface mount device (SMD) package is described. Current results demonstrate that using described technology makes it possible to manufacture all parts of MEMS sensor in the SMD with form factor of SOT-23 package type.
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Sobre autores
K. Oblov
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Email: NNSamotaev@mephi.ru
Rússia, Moscow, 115409
N. Samotaev
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Autor responsável pela correspondência
Email: NNSamotaev@mephi.ru
Rússia, Moscow, 115409
M. Etrekova
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Email: NNSamotaev@mephi.ru
Rússia, Moscow, 115409
A. Gorshkova
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Email: NNSamotaev@mephi.ru
Rússia, Moscow, 115409
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