Raman spectroscopy study of the structure of gallium nitride epitaxial layers of different orientations
- 作者: Yugov A.1, Donskov A.1, Yugova T.1, Belogorohov I.1, Parhomenko Y.1
-
隶属关系:
- Federal State Research and Design Institute of Rare Metal Industry (“Giredmet”)
- 期: 卷 61, 编号 3 (2016)
- 页面: 428-431
- 栏目: Real Structure of Crystals
- URL: https://journals.rcsi.science/1063-7745/article/view/190008
- DOI: https://doi.org/10.1134/S1063774516030299
- ID: 190008
如何引用文章
详细
The composition nonstoichiometry and structural quality of undoped gallium nitride layers grown by the hydride vapor phase epitaxy on sapphire substrates of different orientations have been estimated using Raman spectroscopy. It is found for the first time that the peak position of the phonon mode E2(high) in the Raman spectra of gallium nitride films at a wave vector of 572 cm–1 depends on the initial orientation of sapphire substrate and is low-frequency shifted when passing from Ga-polar to partially N-polar orientation. Additional modes are found in the spectra of GaN layers grown on substrates with m and r orientations. It is shown that a decrease in the composition deviation from stoichiometry, caused by reducing the HCl flow through the gallium source during the growth of GaN layers, leads to an increase in the phonon-mode intensity in the Raman spectrum.
作者简介
A. Yugov
Federal State Research and Design Institute of Rare Metal Industry (“Giredmet”)
编辑信件的主要联系方式.
Email: P_Yugov@mail.ru
俄罗斯联邦, Bol’shoi Tolmachevskii per. 5, Moscow, 119017
A. Donskov
Federal State Research and Design Institute of Rare Metal Industry (“Giredmet”)
Email: P_Yugov@mail.ru
俄罗斯联邦, Bol’shoi Tolmachevskii per. 5, Moscow, 119017
T. Yugova
Federal State Research and Design Institute of Rare Metal Industry (“Giredmet”)
Email: P_Yugov@mail.ru
俄罗斯联邦, Bol’shoi Tolmachevskii per. 5, Moscow, 119017
I. Belogorohov
Federal State Research and Design Institute of Rare Metal Industry (“Giredmet”)
Email: P_Yugov@mail.ru
俄罗斯联邦, Bol’shoi Tolmachevskii per. 5, Moscow, 119017
Yu. Parhomenko
Federal State Research and Design Institute of Rare Metal Industry (“Giredmet”)
Email: P_Yugov@mail.ru
俄罗斯联邦, Bol’shoi Tolmachevskii per. 5, Moscow, 119017