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Plasma-Enhanced CVD Equipment for Deposition of Nanocomposite Nanolayered Films
Porada O.K., Ivashchenko V.I., Ivashchenko L.A., Kozak A.O., Sytikov O.O.
Hard plasmachemical a-SiCN coatings
Porada O.K., Kozak A.O., Ivashchenko V.I., Dub S.M., Tolmacheva G.M.
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