| 期 |
栏目 |
标题 |
文件 |
| 卷 38, 编号 2 (2016) |
Production, Structure, Properties |
Nb–Al–N thin films: Structural transition from nanocrystalline solid solution nc-(Nb,Al)N into nanocomposite nc-(Nb, Al)N/a–AlN |
|
| 卷 38, 编号 4 (2016) |
Production, Structure, Properties |
Hard plasmachemical a-SiCN coatings |
|
| 卷 41, 编号 1 (2019) |
Production, Structure, Properties |
Plasma-Enhanced CVD Equipment for Deposition of Nanocomposite Nanolayered Films |
|
| 卷 41, 编号 2 (2019) |
Production, Structure, Properties |
Deposition and Characterization of Thin Si-B-C-N Films by DC Reactive Magnetron Sputtering of Composed Si/B4C Target |
|
