| Шығарылым |
Бөлім |
Атауы |
Файл |
| Том 38, № 2 (2016) |
Production, Structure, Properties |
Nb–Al–N thin films: Structural transition from nanocrystalline solid solution nc-(Nb,Al)N into nanocomposite nc-(Nb, Al)N/a–AlN |
|
| Том 38, № 4 (2016) |
Production, Structure, Properties |
Hard plasmachemical a-SiCN coatings |
|
| Том 41, № 1 (2019) |
Production, Structure, Properties |
Plasma-Enhanced CVD Equipment for Deposition of Nanocomposite Nanolayered Films |
|
| Том 41, № 2 (2019) |
Production, Structure, Properties |
Deposition and Characterization of Thin Si-B-C-N Films by DC Reactive Magnetron Sputtering of Composed Si/B4C Target |
|
