Nb–Al–N thin films: Structural transition from nanocrystalline solid solution nc-(Nb,Al)N into nanocomposite nc-(Nb, Al)N/a–AlN

详细

Structures and mechanical properties of thin films of the Nb–Al–N system produced by magnetron sputtering of targets from niobium and aluminum in the Ar–N₂ atmosphere have been studied. It has been shown that as the aluminum concentration increases, the structure of a thin film transforms from the nanocrystalline into the nanocomposite one, which consists of nanocrystallites of solid solutions in a matrix of amorphous aluminum nitride. Hardness, elastic modulus, and yield strength of Nb–Al–N thin films have been studied by nanoindentation in the mode of continuous control of the contact stiffness. It has been found that the transition of the structures of Nb–Al–N thin films from the nanocrystalline to the nanocomposite structures results in an increase of hardness and decrease of elastic modulus due to the formation of a thin amorphous interlayer between grains of nanocrystallites. A high hardness to elastic modulus ratio of Nb–Al–N nanocomposite thin films indicates that the films are a promising material for wear-resistant coatings.