A Diamond Diffraction Grating Formed via Ion Implantation
- 作者: Stepanov A.L.1,2, Nuzhdin V.I.1, Galyautdinov M.F.1, Valeev V.F.1, Kurbatova N.V.1, Vorobev V.V.1,2, Osin Y.N.1,2
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隶属关系:
- Zavoisky Physical-Technical Institute
- Interdisciplinary Center for Analytical Microscopy
- 期: 卷 82, 编号 8 (2018)
- 页面: 1047-1051
- 栏目: Proceedings of the XII International Scientific School-Seminar “Fundamental Research and Innovation: Nanooptics, Photonics, and Coherent Spectroscopy”
- URL: https://journals.rcsi.science/1062-8738/article/view/186044
- DOI: https://doi.org/10.3103/S1062873818080403
- ID: 186044
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详细
A fundamentally new way of fabricating a diffraction grating on a surface of diamond via ion (boron) implantation through a superimposed mask is proposed. It is found that graphitization occurs during ion irradiation in unmasked areas in the near-surface region. This graphitization results in the swelling of the surface layer and the formation of a phase periodic structure.
作者简介
A. Stepanov
Zavoisky Physical-Technical Institute; Interdisciplinary Center for Analytical Microscopy
编辑信件的主要联系方式.
Email: aanstep@gmail.com
俄罗斯联邦, Kazan, 420029; Kazan, 420008
V. Nuzhdin
Zavoisky Physical-Technical Institute
Email: aanstep@gmail.com
俄罗斯联邦, Kazan, 420029
M. Galyautdinov
Zavoisky Physical-Technical Institute
Email: aanstep@gmail.com
俄罗斯联邦, Kazan, 420029
V. Valeev
Zavoisky Physical-Technical Institute
Email: aanstep@gmail.com
俄罗斯联邦, Kazan, 420029
N. Kurbatova
Zavoisky Physical-Technical Institute
Email: aanstep@gmail.com
俄罗斯联邦, Kazan, 420029
V. Vorobev
Zavoisky Physical-Technical Institute; Interdisciplinary Center for Analytical Microscopy
Email: aanstep@gmail.com
俄罗斯联邦, Kazan, 420029; Kazan, 420008
Y. Osin
Zavoisky Physical-Technical Institute; Interdisciplinary Center for Analytical Microscopy
Email: aanstep@gmail.com
俄罗斯联邦, Kazan, 420029; Kazan, 420008
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