Kinetic Spectra of Polyatomic Clusters Formed via the Ion Sputtering of Metals

Abstract

A theory is developed for the ion sputtering of metals resulting in the formation of excited neutral and charged clusters with their subsequent fragmentation to a stable state. The effect fragmentation has on the kinetic spectra and charge state of clusters is considered. The results are presented in the form of convenient formulas. Calculations for the kinetic spectra of polyatomic clusters of niobium and silver are given as examples.