Angular and Energy Characteristics of Backscattered Electrons and Allowing for Them in the Three-Dimensional Visualization of Microstructures in Scanning Electron Microscopy

Abstract

The main angular characteristics and resulting semi-empirical equations for back-scattered electrons of medium energy (1–30 kV) are calculated. The results from an analysis are used to develop an optimized detector system of back-scattered electrons for scanning electron microscopes to visualize subsurface microstructures and improve topographic contrast. These results contribute to solving problems of the three-dimensional visualization of surface topography and selective tomography of the subsurface architecture of micro-objects.