Effect of a Platinum Sublayer on the Microstructure and Spontaneous Polarization of Thin Lithium Niobate Films Deposited on a Silicon Substrate

R. N. Zhukov; D. A. Kiselev; T. S. Ilina; A. A. Temirov; I. V. Kubasov; A. S. Bykov; M. D. Malinkovich; Yu. N. Parkhomenko; A. G. Savchenko

doi:10.3103/S1062873818090265

Effect of a Platinum Sublayer on the Microstructure and Spontaneous Polarization of Thin Lithium Niobate Films Deposited on a Silicon Substrate

作者: Zhukov R.N.¹, Kiselev D.A.¹, Ilina T.S.¹, Temirov A.A.¹, Kubasov I.V.¹, Bykov A.S.¹, Malinkovich M.D.¹, Parkhomenko Y.N.¹, Savchenko A.G.¹
隶属关系:
1. National University of Science and Technology MISiS
期: 卷 82, 编号 9 (2018)
页面: 1232-1235
栏目: Article
URL: https://journals.rcsi.science/1062-8738/article/view/186368
DOI: https://doi.org/10.3103/S1062873818090265
ID: 186368

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the microstructure, value of self-polarization, and local piezoelectric hysteresis loops of LiNbO₃ thin films synthesized on silicon substrates with a native SiO_x layer and with a platinum layer are compared via scanning probe microscopy. It is found that smoother surfaces, smaller grain sizes, and a simultaneous higher self-polarization value and effective piezoelectric coefficient are typical of LiNbO₃ films applied to a silicon substrate with a platinum sublayer.