Quantitative estimates of the content of the metastable Si-XII, Si-III, and α-Si phases of silicon in the areas of indenter impressions

Abstract

A quantitative estimate is presented of the specific and total volumes of the metastable Si-XII, Si-III, and α-Si phases of silicon in a locally strained (Berkovich pyramid) area. Calculations are performed using experimental data obtained via Raman spectroscopy and in situ registration of the Si-I → Si-II phase transitions of silicon under the indenter.