Email this article Modes of a hybrid nanoscope for conducting comprehensive investigations of nanostructured materials
- Authors: Gelever V.D.1, Usachev E.Y.1, Manushkin A.A.1
-
Affiliations:
- Moscow State Technical University of Radio Engineering, Electronics, and Automation
- Issue: Vol 80, No 12 (2016)
- Pages: 1441-1449
- Section: Proceedings of the XIX Russian Symposium “On Scanning Electron Microscopy and Analytical Methods of Investigation Used in Solid State Physics”
- URL: https://journals.rcsi.science/1062-8738/article/view/184901
- DOI: https://doi.org/10.3103/S1062873816120066
- ID: 184901
Cite item
Open Access
Access granted
Subscription Access
Abstract
A hybrid nanoscope is developed for complex investigations of the surfaces and structures of micro- and nanoscale objects. It economically combines the best features of spectral detectors and electronic, X-ray, probe, and optical microscopes. One part of an object can be investigated using different combinations of light, electron beams, X-rays, scanning probes, and spectral detectors.
About the authors
V. D. Gelever
Moscow State Technical University of Radio Engineering, Electronics, and Automation
Author for correspondence.
Email: gelgan@yandex.ru
Russian Federation, Moscow, 105275
E. Yu. Usachev
Moscow State Technical University of Radio Engineering, Electronics, and Automation
Email: gelgan@yandex.ru
Russian Federation, Moscow, 105275
A. A. Manushkin
Moscow State Technical University of Radio Engineering, Electronics, and Automation
Email: gelgan@yandex.ru
Russian Federation, Moscow, 105275
Supplementary files
