Choosing the ranges for measuring the reflectivity of a prism coupler in the waveguide spectroscopy of thin films

A. B. Sotsky; L. M. Steingart; S. O. Parashkov; L. I. Sotskaya

doi:10.3103/S1062873816040304

Choosing the ranges for measuring the reflectivity of a prism coupler in the waveguide spectroscopy of thin films

作者: Sotsky A.B.¹, Steingart L.M.², Parashkov S.O.¹, Sotskaya L.I.³
隶属关系:
1. Kuleshov State University
2. Metricon Corporation
3. Belarussian–Russian University
期: 卷 80, 编号 4 (2016)
页面: 421-425
栏目: Proceedings of the XI Conference “Lasers and Laser Information Technologies: Fundamental Problems and Applications”
URL: https://journals.rcsi.science/1062-8738/article/view/184239
DOI: https://doi.org/10.3103/S1062873816040304
ID: 184239

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详细

A criterion for selecting the best ranges for measuring the reflectivity of a prism coupler, based on minimizing the error in reconstructing the parameters of thin films using the least-square method, is proposed. The effectiveness of the criterion is demonstrated by solving the inverse optical problem for a SiO_x film deposited on a silicon substrate as an example.