Email this article Choosing the ranges for measuring the reflectivity of a prism coupler in the waveguide spectroscopy of thin films
- Authors: Sotsky A.B.1, Steingart L.M.2, Parashkov S.O.1, Sotskaya L.I.3
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Affiliations:
- Kuleshov State University
- Metricon Corporation
- Belarussian–Russian University
- Issue: Vol 80, No 4 (2016)
- Pages: 421-425
- Section: Proceedings of the XI Conference “Lasers and Laser Information Technologies: Fundamental Problems and Applications”
- URL: https://journals.rcsi.science/1062-8738/article/view/184239
- DOI: https://doi.org/10.3103/S1062873816040304
- ID: 184239
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Abstract
A criterion for selecting the best ranges for measuring the reflectivity of a prism coupler, based on minimizing the error in reconstructing the parameters of thin films using the least-square method, is proposed. The effectiveness of the criterion is demonstrated by solving the inverse optical problem for a SiOx film deposited on a silicon substrate as an example.
About the authors
A. B. Sotsky
Kuleshov State University
Author for correspondence.
Email: ab_sotsky@mail.ru
Belarus, Mogilev, 212022
L. M. Steingart
Metricon Corporation
Email: ab_sotsky@mail.ru
United States, Pennington, New Jersey, 08534
S. O. Parashkov
Kuleshov State University
Email: ab_sotsky@mail.ru
Belarus, Mogilev, 212022
L. I. Sotskaya
Belarussian–Russian University
Email: ab_sotsky@mail.ru
Belarus, Mogilev, 212000
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