A spectroscopic prism coupler for measuring the refractive indices and thicknesses of dielectric films
- Authors: Asharchuk I.M.1, Marusin N.V.1, Molchanova S.I.1, Savelyev A.G.1, Sokolov V.I.1, Khaydukov E.V.1, Panchenko V.Y.1
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Affiliations:
- Institute of Laser and Information Technologies
- Issue: Vol 80, No 4 (2016)
- Pages: 413-416
- Section: Proceedings of the XI Conference “Lasers and Laser Information Technologies: Fundamental Problems and Applications”
- URL: https://journals.rcsi.science/1062-8738/article/view/184227
- DOI: https://doi.org/10.3103/S1062873816040043
- ID: 184227
Cite item
Abstract
A spectroscopic prism coupler is created for measuring refractive indices nf and thicknesses Hf of dielectric films. The operating principle of the device is based on the simultaneous resonance excitation of several waveguide modes in a film by a focused TE or TM polarized light beam in the geometry of frustrated total internal reflection. Calculations of nf and Hf are performed using measured angular positions θm of dark m-lines in the cross section of the specularly reflected beam. Using obtained angles θm, we can calculate effective refractive indices βm of modes. By solving a set of nonlinear dispersion equations for the modes of a planar waveguide, we can calculate refractive index nf and thickness Hf of a film. The proposed prism coupler has no moving parts and allows us to measure the optical parameters of films 0.5–10 μm thick in the 400–1100 nm range of wavelengths. The device can also be used as a spectroscopic refractometer for measuring the refractive indices of bulk media. The device is used to measure refractive index and thickness of a SiO film and the refractive index of TF4 glass.
About the authors
I. M. Asharchuk
Institute of Laser and Information Technologies
Email: visokol@rambler.ru
Russian Federation, Shatura, Moscow oblast, 140700
N. V. Marusin
Institute of Laser and Information Technologies
Email: visokol@rambler.ru
Russian Federation, Shatura, Moscow oblast, 140700
S. I. Molchanova
Institute of Laser and Information Technologies
Email: visokol@rambler.ru
Russian Federation, Shatura, Moscow oblast, 140700
A. G. Savelyev
Institute of Laser and Information Technologies
Email: visokol@rambler.ru
Russian Federation, Shatura, Moscow oblast, 140700
V. I. Sokolov
Institute of Laser and Information Technologies
Author for correspondence.
Email: visokol@rambler.ru
Russian Federation, Shatura, Moscow oblast, 140700
E. V. Khaydukov
Institute of Laser and Information Technologies
Email: visokol@rambler.ru
Russian Federation, Shatura, Moscow oblast, 140700
V. Ya. Panchenko
Institute of Laser and Information Technologies
Email: visokol@rambler.ru
Russian Federation, Shatura, Moscow oblast, 140700