Email this article Calculating the probability of pore formation by multicharged ions incident on an ultrathin film
- Authors: Filippov G.M.1, Aleksandrov V.A.2
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Affiliations:
- Yakovlev Chuvash State Pedagogical University
- Ul’yanov Chuvash State University
- Issue: Vol 80, No 2 (2016)
- Pages: 125-128
- Section: Proceedings of the 22nd International Conference “Ion-Surface Interaction (ISI-2015)”
- URL: https://journals.rcsi.science/1062-8738/article/view/183796
- DOI: https://doi.org/10.3103/S1062873816020076
- ID: 183796
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Abstract
The problem of pore formation during the propagation of Xe+q ions with energies of around 50 keV and charges q = 20–54 through an ultrathin carbon film is discussed. The results from calculations suggest that pore formation can be attributed to the perforation of part of a bombarded film by the moving wave packet of a xenon ion with a sufficiently high charge.
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About the authors
G. M. Filippov
Yakovlev Chuvash State Pedagogical University
Author for correspondence.
Email: filippov38-gm@yandex.ru
Russian Federation, Cheboksary, 428000
V. A. Aleksandrov
Ul’yanov Chuvash State University
Email: filippov38-gm@yandex.ru
Russian Federation, Cheboksary, 428015
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