Pulsed plasma-immersion ion implantation of aluminum into VT1-0 titanium

Abstract

The results from investigating the pulsed plasma-immersion ion implantation of aluminum into VT1-0 titanium are presented. It is shown that variations in the elemental and phase composition of surface layers, their microscopic characteristics, and their mechanical properties as a function of implantation time are not monotonous but follow certain patterns. The possibility of interpreting the obtained data in terms of surface modification by metallic clusters with at least ~100 atoms generated in the gas of metal atoms evaporated from cathode spots is discussed.