Adjustment of Phase Shift of Measurement Signals in an Optical Encoder from the Parameters of an Analyzing Scale
- 作者: Zherdev A.1, Kovalev M.1, Shishova M.1, Odinokov S.1, Lushnikov D.1, Markin V.1
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隶属关系:
- Bauman Moscow State Technical University (BMSTU)
- 期: 卷 62, 编号 6 (2019)
- 页面: 511-518
- 栏目: Optophysical Measurements
- URL: https://journals.rcsi.science/0543-1972/article/view/246738
- DOI: https://doi.org/10.1007/s11018-019-01654-6
- ID: 246738
如何引用文章
详细
Optical sensors of linear displacements with diffraction gratings serving as the measurement scales are investigated. A method of stabilization of the phase difference of quadrature measurement signals, consisting in the use of an analyzing scale with a special structure, is proposed. A design of an optical encoder based on the method is proposed. Mathematical simulation of the phase shift of the measurement signals as a function of the parameters of the diffraction grating is performed, and the results of the simulation are presented. The RCWA method is used to simulate the passage of radiation through the optical system. The optimal parameters of the structure of the analyzing scale are calculated. Experimental investigations of a mock-up of the encoder are performed and results of measurements of the phase difference of the measurement signals are presented.
作者简介
A. Zherdev
Bauman Moscow State Technical University (BMSTU)
编辑信件的主要联系方式.
Email: zherdev@bmstu.ru
俄罗斯联邦, Moscow
M. Kovalev
Bauman Moscow State Technical University (BMSTU)
Email: zherdev@bmstu.ru
俄罗斯联邦, Moscow
M. Shishova
Bauman Moscow State Technical University (BMSTU)
Email: zherdev@bmstu.ru
俄罗斯联邦, Moscow
S. Odinokov
Bauman Moscow State Technical University (BMSTU)
Email: zherdev@bmstu.ru
俄罗斯联邦, Moscow
D. Lushnikov
Bauman Moscow State Technical University (BMSTU)
Email: zherdev@bmstu.ru
俄罗斯联邦, Moscow
V. Markin
Bauman Moscow State Technical University (BMSTU)
Email: zherdev@bmstu.ru
俄罗斯联邦, Moscow