Technique for Contactless Measurements of the Electromagnetic Parameters of Thin Films and Nanomaterials

详细

A contactless operational method for measuring the electromagnetic parameters of thin films and nanomaterials is developed. It is based on probing the monitored surface with an electromagnetic signal. The measurement procedure is described mathematically. A method is presented for calculating the unknown parameters based on measuring the amplitude and phase of the reflected signal at different frequencies and solving a system of algebraic equations.