Development of Piezoelectric Dynamic Deformation Transducers Based on Hot Polarization of Lead Zirconate-Titanate Ferroelectric Films

Аннотация

A technique of hot periodic sawtooth polarization of lead zirconate-titanate ferroelectric thin films is described. The films are deposited by reactive RF sputtering on a metal foil. Work on the development of oscillator-type piezoelectric dynamic deformation sensors is discussed.