Development of Piezoelectric Dynamic Deformation Transducers Based on Hot Polarization of Lead Zirconate-Titanate Ferroelectric Films

Yu. V. Esipov; S. V. Biryukov; S. I. Masychev; V. M. Mukhortov

doi:10.1007/s11018-016-0983-4

Development of Piezoelectric Dynamic Deformation Transducers Based on Hot Polarization of Lead Zirconate-Titanate Ferroelectric Films

作者: Esipov Y.V.¹, Biryukov S.V.¹, Masychev S.I.¹, Mukhortov V.M.¹
隶属关系:
1. Southern Scientific Center, Russian Academy of Sciences
期: 卷 59, 编号 4 (2016)
页面: 423-427
栏目: Acoustic Measurements
URL: https://journals.rcsi.science/0543-1972/article/view/245874
DOI: https://doi.org/10.1007/s11018-016-0983-4
ID: 245874

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详细

A technique of hot periodic sawtooth polarization of lead zirconate-titanate ferroelectric thin films is described. The films are deposited by reactive RF sputtering on a metal foil. Work on the development of oscillator-type piezoelectric dynamic deformation sensors is discussed.