Отправить статью по E-mail Hardware/Software Complex for Electrophysical Management of CMOS Technology on Test Structures
- Авторы: Popovskikh K.G.1, Soldatov V.S.1, Oreshkov M.V.2
-
Учреждения:
- National Research University – Moscow Power Engineering Institute (MPEI)
- Federal Scientific Center – Research Institute for System Studies, Russian Academy of Sciences
- Выпуск: Том 59, № 9 (2016)
- Страницы: 904-910
- Раздел: Nanometrology
- URL: https://journals.rcsi.science/0543-1972/article/view/245484
- DOI: https://doi.org/10.1007/s11018-016-1065-3
- ID: 245484
Цитировать
Открытый доступ
Доступ предоставлен
Только для подписчиков
Аннотация
A combined procedural and hardware complex of electrophysical methods for management of submicrometric CMOS integrated circuit technology is developed and implemented. Programmable switching of the elements of the complex that makes it possible to utilize a mutually complementary measurement technique to obtain information needed to correct the production process is created. The complex includes programs to control the measurement and calculation of required characteristics.
Об авторах
K. Popovskikh
National Research University – Moscow Power Engineering Institute (MPEI)
Автор, ответственный за переписку.
Email: k.popovskikh@mail.ru
Россия, Moscow
V. Soldatov
National Research University – Moscow Power Engineering Institute (MPEI)
Email: k.popovskikh@mail.ru
Россия, Moscow
M. Oreshkov
Federal Scientific Center – Research Institute for System Studies, Russian Academy of Sciences
Email: k.popovskikh@mail.ru
Россия, Moscow
Дополнительные файлы
