Мақаланы E-mail арқылы жіберу Hardware/Software Complex for Electrophysical Management of CMOS Technology on Test Structures
- Авторлар: Popovskikh K.G.1, Soldatov V.S.1, Oreshkov M.V.2
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Мекемелер:
- National Research University – Moscow Power Engineering Institute (MPEI)
- Federal Scientific Center – Research Institute for System Studies, Russian Academy of Sciences
- Шығарылым: Том 59, № 9 (2016)
- Беттер: 904-910
- Бөлім: Nanometrology
- URL: https://journals.rcsi.science/0543-1972/article/view/245484
- DOI: https://doi.org/10.1007/s11018-016-1065-3
- ID: 245484
Дәйексөз келтіру
Ашық рұқсат
Рұқсат берілді
Тек жазылушылар үшін
Аннотация
A combined procedural and hardware complex of electrophysical methods for management of submicrometric CMOS integrated circuit technology is developed and implemented. Programmable switching of the elements of the complex that makes it possible to utilize a mutually complementary measurement technique to obtain information needed to correct the production process is created. The complex includes programs to control the measurement and calculation of required characteristics.
Авторлар туралы
K. Popovskikh
National Research University – Moscow Power Engineering Institute (MPEI)
Хат алмасуға жауапты Автор.
Email: k.popovskikh@mail.ru
Ресей, Moscow
V. Soldatov
National Research University – Moscow Power Engineering Institute (MPEI)
Email: k.popovskikh@mail.ru
Ресей, Moscow
M. Oreshkov
Federal Scientific Center – Research Institute for System Studies, Russian Academy of Sciences
Email: k.popovskikh@mail.ru
Ресей, Moscow
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