Combining Measurement and Control Functions in the Structure of a Multilayer Piezoelectric Actuator of Nano- and Micro-Motions

Abstract

The principles of creating precision positioning devices based on the piezoelectric effect were studied. A promising scientific direction in the development of piezo actuators is distinguished – the creation of self-sensing devices simultaneously performing functions of an actuating mechanism (actuator) and primary measuring transducer (feedback sensor). An original structure of an adaptive multilayer piezoelectric actuator of nano- and micro-motions was developed. Its structural scheme is given and its advantages are shown.