Experimental Study of Three-Dimensional Reconstruction of Relief Structures from Stereo Images Obtained in a Scanning Electron Microscope

Abstract

We present research results of three-dimensional surface reconstruction from stereo images of silicon structures with trapezoidal profile of the relief elements. The stereo images were obtained from a scanning electron microscope. We compared results from transmission scanning electron and atomic force microscopy. It was found that the formation of an insular film of gold on the surface of the test object can increase the accuracy of the results of the three-dimensional reconstruction. Reconstruction error for a protrusion height of 597–600 nm was less than 4%.