Effect of prolonged annealing on the morphology and optical properties of ZnO films produced by magnetron sputtering

V. V. Tomaev; Томаев В. В.; V. A. Polishchuk; Полищук В. А.; N. B. Leonov; Леонов Н. Б.; T. A. Vartanyan; Вартанян Т. А.

doi:10.31857/S0367676523702526

Effect of prolonged annealing on the morphology and optical properties of ZnO films produced by magnetron sputtering

Authors: Tomaev V.V.¹^,2, Polishchuk V.A.³, Leonov N.B.⁴, Vartanyan T.A.⁴
Affiliations:
1. St. Petersburg State Institute of Technology
2. St. Petersburg Mining University
3. Admiral Makarov State University of Maritime and Inland Shiping
4. National Research University ITMO
Issue: Vol 87, No 10 (2023)
Pages: 1446-1451
Section: Articles
URL: https://journals.rcsi.science/0367-6765/article/view/141841
DOI: https://doi.org/10.31857/S0367676523702526
EDN: https://elibrary.ru/KIRFEB
ID: 141841

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Abstract

The effect of annealing time on the structural and optical properties of ZnO films, which are formed from Zn films obtained by magnetron sputtering followed by oxidation in air, is described. Thermal oxidation in air was carried out for 7 and 24 hours, respectively, in a programmable muffle furnace at T = 750°C. A change in the structure of the film surface depending on the annealing time of the Zn film and the substrate material was found, which manifests itself in the optical properties of the films.

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