Thermodynamic Simulation of the AIII–BV Semiconductor Melts

Аннотация

The equilibrium compositions and the thermodynamic characteristics of binary Ga–Sb, Al–Sb, and In–Sb melts are studied by a thermodynamic simulation using the TERRA software package over wide temperature and composition ranges. The temperature dependences of the partial pressures of the components of the gas phase forming above the III–V (III = Ga, In; V = Sb) semiconductor melts are investigated. The concentration dependences of the component activities and the partial and integral characteristics of melt mixing are obtained. All melts under study are shown to exhibit large negative deviations from Raoult’s law, which is caused by the presence of associates and indicates a strong interaction between the melt components. The temperature dependences of the logarithms and the partial pressures of the gas phase components are obtained. These dependences are shown to be linear for the components of the gas phase forming over the Ga–Sb, Al–Sb, and In–Sb melts.