Отправить статью по E-mail Method for stepped etching of optical glass fibers
- Авторы: Vasil’ev M.G.1, Vasil’ev A.M.1, Golovanov V.V.1, Izotov A.D.1, Shelyakin A.A.1
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Учреждения:
- Kurnakov Institute of General and Inorganic Chemistry
- Выпуск: Том 61, № 9 (2016)
- Страницы: 1160-1162
- Раздел: Physical Methods of Investigation
- URL: https://journals.rcsi.science/0036-0236/article/view/166768
- DOI: https://doi.org/10.1134/S0036023616090205
- ID: 166768
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Аннотация
A method for stepped etching of optical glass fibers using various compositions of etching agents based on a 40% hydrofluoric acid (HF) and aqueous solutions of ammonium fluoride (NH4F) has been considered. Compositions, etching rates, the dependence of etching rate on temperature, and tyeh dependence of etching forms on composition have been determined. The potential use of the method for stepped etching of optical glass fibers in the manufacture of microelectronic devices has been demonstrated.
Об авторах
M. Vasil’ev
Kurnakov Institute of General and Inorganic Chemistry
Автор, ответственный за переписку.
Email: mgvas@igic.ras.ru
Россия, Leninskii pr. 31, Moscow, 119991
A. Vasil’ev
Kurnakov Institute of General and Inorganic Chemistry
Email: mgvas@igic.ras.ru
Россия, Leninskii pr. 31, Moscow, 119991
V. Golovanov
Kurnakov Institute of General and Inorganic Chemistry
Email: mgvas@igic.ras.ru
Россия, Leninskii pr. 31, Moscow, 119991
A. Izotov
Kurnakov Institute of General and Inorganic Chemistry
Email: mgvas@igic.ras.ru
Россия, Leninskii pr. 31, Moscow, 119991
A. Shelyakin
Kurnakov Institute of General and Inorganic Chemistry
Email: mgvas@igic.ras.ru
Россия, Leninskii pr. 31, Moscow, 119991
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