A Dielectric Waveguide Made of the High-Resistance Silicon and the Circuitry Based on This Waveguide
- Authors: Parkhomenko M.P.1, Kalenov D.S.1, Eremin I.S.1, Fedoseev N.A.1
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Affiliations:
- Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch, Russian Academy of Sciences
- Issue: Vol 68, No 2 (2023)
- Pages: 171-176
- Section: ЭЛЕКТРОНИКА СВЧ
- URL: https://journals.rcsi.science/0033-8494/article/view/138117
- DOI: https://doi.org/10.31857/S0033849423020110
- EDN: https://elibrary.ru/LCSTFO
- ID: 138117
Cite item
Abstract
Optically and mechanically controlled attenuators and an electrically controlled phase shifter are developed on the basis of a dielectric waveguide made of the high-resistance silicon. The characteristics of the waveguide and elements developed on its basis are theoretically and experimentally determined in the frequency band 26–37 GHz.
About the authors
M. P. Parkhomenko
Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch, Russian Academy of Sciences
Email: pamikle@yandex.ru
Fryazino, Moscow oblast, 141190 Russia
D. S. Kalenov
Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch, Russian Academy of Sciences
Email: pamikle@yandex.ru
Fryazino, Moscow oblast, 141190 Russia
I. S. Eremin
Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch, Russian Academy of Sciences
Email: pamikle@yandex.ru
Fryazino, Moscow oblast, 141190 Russia
N. A. Fedoseev
Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch, Russian Academy of Sciences
Author for correspondence.
Email: pamikle@yandex.ru
Fryazino, Moscow oblast, 141190 Russia
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