Precision Position Sensor for Operational Control of Laser Synthesis of Microstructures on Three-Dimensional Surfaces of Optical Materials

M. A. Zavyalova; Завьялова М. А.; A. V. Soldatenko; Солдатенко А. В.; S. A. Kokarev; Кокарев С. А.

doi:10.31857/S003281622302012X

Precision Position Sensor for Operational Control of Laser Synthesis of Microstructures on Three-Dimensional Surfaces of Optical Materials

Authors: Zavyalova M.A.¹, Soldatenko A.V.¹, Kokarev S.A.¹
Affiliations:
1. Design and Technology Institute of Scientific Instrumentation, Siberian Branch, Russian Academy of Sciences
Issue: No 3 (2023)
Pages: 80-90
Section: ОБЩАЯ ЭКСПЕРИМЕНТАЛЬНАЯ ТЕХНИКА
URL: https://journals.rcsi.science/0032-8162/article/view/138376
DOI: https://doi.org/10.31857/S003281622302012X
EDN: https://elibrary.ru/UXQXIW
ID: 138376

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Abstract

The results of computer simulation of a precision position sensor based on the Foucault knife for automatic focusing of radiation during high-speed laser technological processes are presented, and the results of its implementation and testing at industrial enterprises as part of circular laser recording systems are presented. This sensor is built into laser complexes for microstructuring the surface of optical materials and makes it possible to determine their position with high resolution (the error does not exceed 0.1 µm).

References

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