Microwave Discharges and Their Application. I. Surface Microwave Discharge
- Authors: Shibkov V.M.1
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Affiliations:
- Department of Physics
- Issue: Vol 74, No 5 (2019)
- Pages: 421-437
- Section: Chemical Physics, Physical Kinetics, and Plasma Physics (Review)
- URL: https://journals.rcsi.science/0027-1349/article/view/165170
- DOI: https://doi.org/10.3103/S002713491905014X
- ID: 165170
Cite item
Abstract
This article presents the results of a series of fundamental studies on a new type of a surface microwave discharge conducted at the Department of Physics of Moscow State University. The discharge is created by a surface wave on a dielectric antenna when powerful electromagnetic radiation in the centimeter wavelength range is supplied to it. The basic properties of a microwave discharge and the spatiotemporal evolution of the parameters of plasma generated by a surface discharge are investigated in a wide range of changes in external conditions.
About the authors
V. M. Shibkov
Department of Physics
Author for correspondence.
Email: shibkov@phys.msu.ru
Russian Federation, Moscow, 119991
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