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Vol 59, No 7 (2018)
Physicochemical Properties and Structure of SiCxNy:Fe Films Grown From a Gas Mixture of Ferrocene, Hydrogen and 1,1,3,3,5,5-Hexamethylcyclotrisilazane
Fainer N.I., Pushkarev R.V., Ehrenburg S.B., Trubina S.V., Shestakov V.A., Merenkov I.S., Terauchi M.
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(Eng)
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