Email this article Measuring The Temperature and Density of Secondary Electrons in an Argon Electron-Beam Plasma
- Authors: Shchukin V.G.1, Sharafutdinov R.G.1, Konstantinov V.O.1
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Affiliations:
- Kutateladze Institute of Thermophysics, Siberian Branch
- Issue: Vol 59, No 5 (2018)
- Pages: 867-873
- Section: Article
- URL: https://journals.rcsi.science/0021-8944/article/view/161332
- DOI: https://doi.org/10.1134/S0021894418050140
- ID: 161332
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Abstract
The results of temperature and density measurements of secondary electrons in a free jet of argon, activated in an electron beam plasma, carried out using a Langmuir double electrostatic probe. A cold plasmatron prototype with a primary beam energy of 1 keV is used obtain a jet of dense cold plasma with a cross size of approximately 80 mm and parameters with which silicon layers may be deposited with necessary characteristics in a forvacuum pressure range.
About the authors
V. G. Shchukin
Kutateladze Institute of Thermophysics, Siberian Branch
Email: konstantinov@itp.nsc.ru
Russian Federation, Novosibirsk, 630090
R. G. Sharafutdinov
Kutateladze Institute of Thermophysics, Siberian Branch
Email: konstantinov@itp.nsc.ru
Russian Federation, Novosibirsk, 630090
V. O. Konstantinov
Kutateladze Institute of Thermophysics, Siberian Branch
Author for correspondence.
Email: konstantinov@itp.nsc.ru
Russian Federation, Novosibirsk, 630090
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