Measuring The Temperature and Density of Secondary Electrons in an Argon Electron-Beam Plasma


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Resumo

The results of temperature and density measurements of secondary electrons in a free jet of argon, activated in an electron beam plasma, carried out using a Langmuir double electrostatic probe. A cold plasmatron prototype with a primary beam energy of 1 keV is used obtain a jet of dense cold plasma with a cross size of approximately 80 mm and parameters with which silicon layers may be deposited with necessary characteristics in a forvacuum pressure range.

Sobre autores

V. Shchukin

Kutateladze Institute of Thermophysics, Siberian Branch

Email: konstantinov@itp.nsc.ru
Rússia, Novosibirsk, 630090

R. Sharafutdinov

Kutateladze Institute of Thermophysics, Siberian Branch

Email: konstantinov@itp.nsc.ru
Rússia, Novosibirsk, 630090

V. Konstantinov

Kutateladze Institute of Thermophysics, Siberian Branch

Autor responsável pela correspondência
Email: konstantinov@itp.nsc.ru
Rússia, Novosibirsk, 630090

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