Test of a new tip material for Langmuir probe diagnostic


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The objective of the work is to test a nickel–chrome alloy as a probe tip material for characterization of discharge plasmas. In order to meet the objective, a symmetric triple Langmuir probe diagnostic system and an associated driving circuit are designed and tested in an inductively coupled plasma generated by a 13.56-MHz radio frequency source coupled with an automated impedance match network. This probe is used to measure the electron temperature, electron number density, and ion saturation current as functions of the input power of the radio frequency source and the filling gas pressure. An increasing trend is noticed in the electron temperature and electron number density with an increase in the input power, whilst a decreasing trend is evident in these parameters with an increase in the nitrogen gas pressure. The overall inaccuracies in electron temperature and electron number density measurements are 5–12% and 3–13%, respectively.

Sobre autores

M. Naz

Department of Fundamental and Applied Sciences; Department of Physics

Autor responsável pela correspondência
Email: yasin603@yahoo.com
Malásia, Bandar Seri Iskandar, 31750; Faisalabad, 38040

S. Shukrullah

Department of Fundamental and Applied Sciences; Department of Physics

Email: yasin603@yahoo.com
Malásia, Bandar Seri Iskandar, 31750; Faisalabad, 38040

A. Ghaffar

Department of Physics

Email: yasin603@yahoo.com
Paquistão, Faisalabad, 38040

N. Rehman

Department of Electrical Engineering; Department of Physics

Email: yasin603@yahoo.com
Arábia Saudita, Riyadh, 11451; Islamabad

Y. Khan

Deanship of scientific research

Email: yasin603@yahoo.com
Arábia Saudita, Riyadh, 11451

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