Test of a new tip material for Langmuir probe diagnostic
- Autores: Naz M.Y.1,2, Shukrullah S.1,2, Ghaffar A.2, Rehman N.U.3,2, Khan Y.4
-
Afiliações:
- Department of Fundamental and Applied Sciences
- Department of Physics
- Department of Electrical Engineering
- Deanship of scientific research
- Edição: Volume 57, Nº 2 (2016)
- Páginas: 211-218
- Seção: Article
- URL: https://journals.rcsi.science/0021-8944/article/view/159115
- DOI: https://doi.org/10.1134/S0021894416020036
- ID: 159115
Citar
Resumo
The objective of the work is to test a nickel–chrome alloy as a probe tip material for characterization of discharge plasmas. In order to meet the objective, a symmetric triple Langmuir probe diagnostic system and an associated driving circuit are designed and tested in an inductively coupled plasma generated by a 13.56-MHz radio frequency source coupled with an automated impedance match network. This probe is used to measure the electron temperature, electron number density, and ion saturation current as functions of the input power of the radio frequency source and the filling gas pressure. An increasing trend is noticed in the electron temperature and electron number density with an increase in the input power, whilst a decreasing trend is evident in these parameters with an increase in the nitrogen gas pressure. The overall inaccuracies in electron temperature and electron number density measurements are 5–12% and 3–13%, respectively.
Palavras-chave
Sobre autores
M. Naz
Department of Fundamental and Applied Sciences; Department of Physics
Autor responsável pela correspondência
Email: yasin603@yahoo.com
Malásia, Bandar Seri Iskandar, 31750; Faisalabad, 38040
S. Shukrullah
Department of Fundamental and Applied Sciences; Department of Physics
Email: yasin603@yahoo.com
Malásia, Bandar Seri Iskandar, 31750; Faisalabad, 38040
A. Ghaffar
Department of Physics
Email: yasin603@yahoo.com
Paquistão, Faisalabad, 38040
N. Rehman
Department of Electrical Engineering; Department of Physics
Email: yasin603@yahoo.com
Arábia Saudita, Riyadh, 11451; Islamabad
Y. Khan
Deanship of scientific research
Email: yasin603@yahoo.com
Arábia Saudita, Riyadh, 11451
Arquivos suplementares
