Near-fild optical lithography in application to plasmonic antennas characterization


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Proposed a method of measurements for both electrical field enhancement and size of near-field localization area for plasmonic antenna-probe. The method is based on optical modification of photosensitive sample. Shown the results of the proposed method and subdiffraction resolution of test image is demonstrated.

作者简介

A. Shelaev

NT-MDT Co., build. 317-A

编辑信件的主要联系方式.
Email: shelaev@ntmdt.ru
俄罗斯联邦, Zelenograd, Moscow, 124482

P. Dorozhkin

NT-MDT Co., build. 317-A; Skolkovo Institute of Science and Technology

Email: shelaev@ntmdt.ru
俄罗斯联邦, Zelenograd, Moscow, 124482; ul. Nobelya 3, Moscow, 143026

V. Bykov

NT-MDT Co., build. 317-A

Email: shelaev@ntmdt.ru
俄罗斯联邦, Zelenograd, Moscow, 124482

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