Fe2+ Diffusion in CVD ZnSe during Annealing in Different (Ar, Zn, and Se) Atmospheres

详细

We have studied Fe²⁺ diffusion in polycrystalline CVD ZnSe during high-temperature (900–1100°C) annealing in different atmospheres, determined effective Fe²⁺ diffusion coefficients in CVD ZnSe, and evaluated the activation energy for the diffusion process. Distinctive features of the doping process in Zn vapor have been identified that are responsible for the observed order-of-magnitude increase in Fe diffusion rate in comparison with annealing in Ar and Se. The effect of annealing conditions on Fe diffusion mechanisms is discussed.