Composition, Structure, and Dielectric Characteristics of (Sr0.5Ba0.5)Nb2O6/Pt(111)/Si(001) Films
- Авторы: Pavlenko A.V.1,2, Kudryavtsev Y.A.3, Stryukov D.V.1, Anokhin A.S.1, Kovtun A.P.1, Sevast’yanov B.Y.1
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Учреждения:
- Southern Scientific Center, Russian Academy of Sciences
- Research Institute of Physics, Southern Federal University
- Solid State Electronics Section, Cinvestav-IPN
- Выпуск: Том 55, № 2 (2019)
- Страницы: 167-172
- Раздел: Article
- URL: https://journals.rcsi.science/0020-1685/article/view/158644
- DOI: https://doi.org/10.1134/S0020168519020109
- ID: 158644
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Аннотация
Sr0.5Ba0.5Nb2O6 (SBN) relaxor ferroelectric films of different thicknesses have been grown on Pt(111)/Si(001) substrates by rf sputtering. We have studied their structure, composition–depth profiles, lattice dynamics, and dielectric properties at temperatures from 25 to 200°C. The results demonstrate that the composition of the films does not vary with depth and corresponds to that of the ceramic target used and that the SBN/Pt interface has a transition layer more than 30 nm in thickness, consisting of a mixture of platinum and SBN. According to X-ray diffraction characterization results, the films are polycrystalline, with a preferential orientation of the SBN [001] axis along the normal to the substrate surface. At a film thickness of 950 nm or above, the SBN films on Pt(111)/Si substrates differ insignificantly in unit-cell parameters, lattice dynamics, and Burns temperature from SBN single crystals. We discuss general relationships of structure formation and characteristics of the films.
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Об авторах
A. Pavlenko
Southern Scientific Center, Russian Academy of Sciences; Research Institute of Physics, Southern Federal University
Автор, ответственный за переписку.
Email: ANTVPR@mail.ru
Россия, pr. Chekhova 41, Rostov-on-Don, 344006; pr. Stachki 194, Rostov-on-Don, 344090
Yu. Kudryavtsev
Solid State Electronics Section, Cinvestav-IPN
Email: ANTVPR@mail.ru
Мексика, Av. Instituto Politecnico Nacional, Mexico DFCinvestav-IPN, #, 2508
D. Stryukov
Southern Scientific Center, Russian Academy of Sciences
Email: ANTVPR@mail.ru
Россия, pr. Chekhova 41, Rostov-on-Don, 344006
A. Anokhin
Southern Scientific Center, Russian Academy of Sciences
Email: ANTVPR@mail.ru
Россия, pr. Chekhova 41, Rostov-on-Don, 344006
A. Kovtun
Southern Scientific Center, Russian Academy of Sciences
Email: ANTVPR@mail.ru
Россия, pr. Chekhova 41, Rostov-on-Don, 344006
B. Sevast’yanov
Southern Scientific Center, Russian Academy of Sciences
Email: ANTVPR@mail.ru
Россия, pr. Chekhova 41, Rostov-on-Don, 344006
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