Phase formation in the Ti–Al–Mo–N system during the growth of adaptive wear-resistant coatings by arc PVD

Аннотация

Ti–Al–Mo–N coatings have been grown by arc PVD at different bias voltages, V_b, applied to the substrate and partial pressures of nitrogen reaction gas, p(N₂), in the working chamber. The coatings have a nanocrystalline structure, with an average grain size on the order of 30–40 nm and a layered architecture made up of alternating layers based on a (Ti,Al)N nitride and Mo-containing phases of thickness comparable to the grain size. It has been shown that the phase composition of the coatings depends on V_b and p(N₂): raising the energy of deposited ions by increasing V_b from–120 to–140 V, as well as raising p(N₂) from 0.3 to 0.5 Pa, leads to a more complete molybdenum nitride formation during coating growth, which causes a transition from (Ti,Al)N–Mo–Mo₂N compositions to (Ti,Al)N–Mo₂N. Measurements of the binding energy of Mo 3d photoelectrons in metallic Mo and the Mo₂N nitride by X-ray photoelectron spectroscopy have shown that the transition from the former phase to the latter is accompanied by a negligible energy shift.