Low-voltage beam discharge in light inert gases to solve problems of voltage stabilization

详细

By means of the flat one-sided probe, the electron velocity distribution function is investigated along with plasma parameters distribution and electrokinetic characteristics in short (without positive column) low-voltage beam discharge in helium, neon, and argon. With the pressure increase, the discharge voltage obtains the value of the excitation potential of the metastable level of the filling gas, U_m. The results of the probe measurements of the electron velocity distribution function make it possible to calculate the generation functions of the inelastic process and to make the conclusion that, at attaining the critical pressure, P_cr, when the processes of atom stepwise ionization begin to dominate over the direct ionization, the discharge burning voltage drops below the ionization potential, U_ion. Based on the performed studies, a technique and a device are proposed to stabilize the voltage within the range of 9–50 V by filling the interelectrode gap with inert gases of different excitation and ionization potentials.