Supramolecular 3,4:9,10-perylenetetracarboxylic diimide triads containing moieties of sumanene polyphenol derivative: Synthesis and photochemical transformations


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Resumo

A polyphenol derivative of the sumanene-containing triad with a central perylenetetracarboxylic diimide moiety was synthesized via several consecutive chemical transformations of N,N'-bis(3',5'-dimethoxybenzyl)-1,7-bis[4''-(N,N'-disumanenyl)aminophenyl]perylene-3,4:9,10-tetracarboxylic diimide. The phenolic hydroxyl groups of the resulting derivative were partly protected by introduction of two different protective groups, pentaspiran and tert-butyl butyrate ones. It was shown that this modified derivative can be used to obtain a promising positive-tone photoresists with high parameters for extreme ultraviolet nanolithography on exposure to light at 13.5 nm for the manufacture of 20 to 16 nanometer chips.

Sobre autores

A. Vainer

All-Russia Institute of Medicinal and Aromatic Plants

Autor responsável pela correspondência
Email: nvbarannik@mail.ru
Rússia, ul. Grina 7, Moscow, 113628

K. Dymaev

All-Russia Institute of Medicinal and Aromatic Plants

Email: nvbarannik@mail.ru
Rússia, ul. Grina 7, Moscow, 113628

A. Kovalenko

All-Russia Institute of Medicinal and Aromatic Plants

Email: nvbarannik@mail.ru
Rússia, ul. Grina 7, Moscow, 113628

T. Belskii

All-Russia Institute of Medicinal and Aromatic Plants

Email: nvbarannik@mail.ru
Rússia, ul. Grina 7, Moscow, 113628

S. Krichevskaya

All-Russia Institute of Medicinal and Aromatic Plants

Email: nvbarannik@mail.ru
Rússia, ul. Grina 7, Moscow, 113628

L. Martova

All-Russia Institute of Medicinal and Aromatic Plants

Email: nvbarannik@mail.ru
Rússia, ul. Grina 7, Moscow, 113628

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