Growth of transparent electrical conducting films of indium and tin oxides by chemical vapor deposition

I. G. Atabaev; M. U. Hajiev; V. A. Pak; S. B. Zakirova; Kh. N. Juraev

doi:10.3103/S0003701X16020079

Growth of transparent electrical conducting films of indium and tin oxides by chemical vapor deposition

Authors: Atabaev I.G.¹, Hajiev M.U.¹, Pak V.A.¹, Zakirova S.B.¹, Juraev K.N.¹
Affiliations:
1. Physical-Technical Institute Physics of the Sun
Issue: Vol 52, No 2 (2016)
Pages: 118-121
Section: Heliotechnical Materials Science
URL: https://journals.rcsi.science/0003-701X/article/view/149135
DOI: https://doi.org/10.3103/S0003701X16020079
ID: 149135

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Abstract

ITO structures (indium and tin oxides)/glass characterized by high conductivity and transparency and a thickness of up to 3 μm applicable for the fabrication of solar cells on their basis were grown by the chemical vapor deposition technique in a quasi-closed volume using a separate evaporator.