Growth of transparent electrical conducting films of indium and tin oxides by chemical vapor deposition
- Autores: Atabaev I.G.1, Hajiev M.U.1, Pak V.A.1, Zakirova S.B.1, Juraev K.N.1
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Afiliações:
- Physical-Technical Institute Physics of the Sun
- Edição: Volume 52, Nº 2 (2016)
- Páginas: 118-121
- Seção: Heliotechnical Materials Science
- URL: https://journals.rcsi.science/0003-701X/article/view/149135
- DOI: https://doi.org/10.3103/S0003701X16020079
- ID: 149135
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Resumo
ITO structures (indium and tin oxides)/glass characterized by high conductivity and transparency and a thickness of up to 3 μm applicable for the fabrication of solar cells on their basis were grown by the chemical vapor deposition technique in a quasi-closed volume using a separate evaporator.
Sobre autores
I. Atabaev
Physical-Technical Institute Physics of the Sun
Email: mardonbek@uzsci.net
Uzbequistão, Tashkent
M. Hajiev
Physical-Technical Institute Physics of the Sun
Autor responsável pela correspondência
Email: mardonbek@uzsci.net
Uzbequistão, Tashkent
V. Pak
Physical-Technical Institute Physics of the Sun
Email: mardonbek@uzsci.net
Uzbequistão, Tashkent
S. Zakirova
Physical-Technical Institute Physics of the Sun
Email: mardonbek@uzsci.net
Uzbequistão, Tashkent
Kh. Juraev
Physical-Technical Institute Physics of the Sun
Email: mardonbek@uzsci.net
Uzbequistão, Tashkent
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