Interaction of a Metallic Catalyst with the Barrier Layer Material during High-Temperature Formation of Nickel Nanoparticles

S. V. Bulyarskiy; Булярский С. В.; A. A. Dudin; Дудин А. А.; P. E. L’vov; Львов П. Е.; T. S. Grishin; Гришин Т. С.; G. A. Rudakov; Рудаков Г. А.; G. G. Gusarov; Гусаров Г. Г.

doi:10.31857/S0002337X23030028

Interaction of a Metallic Catalyst with the Barrier Layer Material during High-Temperature Formation of Nickel Nanoparticles

Authors: Bulyarskiy S.V.¹, Dudin A.A.¹, L’vov P.E.¹^,2, Grishin T.S.¹, Rudakov G.A.¹, Gusarov G.G.¹
Affiliations:
1. Institute of Nanotechnology of Microelectronics, Russian Academy of Sciences, 119991, Moscow, Russia
2. Ulyanovsk State University, 432017, Ulyanovsk, Russia
Issue: Vol 59, No 3 (2023)
Pages: 243-250
Section: Articles
URL: https://journals.rcsi.science/0002-337X/article/view/140149
DOI: https://doi.org/10.31857/S0002337X23030028
EDN: https://elibrary.ru/YQKCYZ
ID: 140149

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Abstract
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Abstract

We have studied the effect of annealing conditions on the formation of nickel particles on a titanium nitride barrier layer produced by atomic layer deposition. The results demonstrate that the nanoparticle size depends on annealing temperature and time. At temperatures above 700°C, annealing for more than 5 min results in coalescence, which leads to particle growth and a decrease in the surface density of the particles. During annealing, nickel diffuses into the titanium nitride and the amount of nickel on the surface decreases. The experimental data agree with results of nanoparticle formation modeling in the hydrodynamic model. We have determined the catalyst–buffer interaction potential and melt viscosity, which demonstrate that, in the case of melting of a thin nickel layer, on the order of a few nanometers in thickness, the metal is similar to a supercooled liquid. Modeling results suggest that, during annealing of a thin metal film/barrier layer couple, the average nanoparticle size is smaller at lower potentials of interaction between the constituent materials of the couple.

Keywords

atomic-layer vaporization, barrier layer, titanium nitride, catalyst nanoparticles, hydrodynamic model, interaction potential

References

Булярский С.В. Углеродные нанотрубки: технология, управление свойствами, применение. Ульяновск: Стрежень, 2011. 480 с.
Dasgupta K., Joshi J.B., Banerjee S. Fluidized Bed Synthesis of Carbon Nanotubes – A Review // Chem. Eng. J. 2011. V. 171. № 3. P. 841–869. https://doi.org/10.1016/j.cej.2011.05.038
Kumar M., Ando Y. Chemical Vapor Deposition of Carbon Nanotubes: A Review on Growth Mechanism and Mass Production // J. Nanosci. Nanotechnol. 2010. V. 10. № 6. P. 3739–3758. https://doi.org/10.1166/jnn.2010.2939
Ago H., Komatsu T., Ohshima S., Kuriki Y., Yumura M. Dispersion of Metal Nanoparticles for Aligned Carbon Nanotube Arrays // Appl. Phys. Lett. 2000. V. 77. № 1. P. 79–81. https://doi.org/10.1063/1.126883
Melechko A.V., Merkulov V.I., McKnight T.E., Guillorn M.A., Klein K.L., Lowndes D.H., Simpson M.L. Vertically Aligned Carbon Nanofibers and Related Structures: Controlled Synthesis and Directed Assembly // J. Appl. Phys. 2005. V. 97. № 4. P. 41301. https://doi.org/10.1063/1.1857591
Lee C.J., Park J., Yu J.A. Catalyst Effect on Carbon Nanotubes Synthesized by Thermal Chemical Vapor Deposition // Chem. Phys. Lett. 2002. V. 360. № 3–4. P. 250–255. https://doi.org/10.1016/S0009-2614(02)00831-X
Andrews R., Jacques D., Qian D., Rantell T. Multiwall Carbon Nanotubes: Synthesis and Application // Acc. Chem. Res. 2002. V. 35. № 12. P. 1008–1017. https://doi.org/10.1021/ar010151m
Bulyarskiy S.V., Zenova E.V., Lakalin A.V., Molodenskii M.S., Pavlov A.A., Tagachenkov A.M., Terent’ev A.V. Influence of a Buffer Layer on the Formation of a Thin-Film Nickel Catalyst for Carbon Nanotube Synthesis // Tech. Phys. 2018. V. 63. № 12. P. 1834–1839. https://doi.org/10.1134/S1063784218120253
L’vov P.E., Bulyarskiy S.V., Gusarov G.G., Molodenskiy M.S., Pavlov A.A., Ryazanov R.M., Dudin A.A., Svetukhin V.V. Kinetics of Nickel Particle Formation on Silicon Substrate with a Buffer Layer of Niobium Nitride // J. Phys.: Condens. Matter. 2020. V. 32. № 24. P. 245001. https://doi.org/10.1088/1361-648X/ab7870
Львов П.Е., Светухин В.В., Булярский С.В., Павлов А.А. Моделирование смачивающих фазовых переходов в тонких пленках // Физика твердого тела. 2019. T. 61. № 10. C. 1916–1925.
Peng Y., Wang Z., Alsayed A.M., Yodh A.G., Han Y. Publisher’s Note: Melting of Colloidal Crystal Films // Phys. Rev. Lett. 2010. V. 104. № 21. P. 205703. https://doi.org/10.1103/PhysRevLett.104.219901
Thiele U. Recent Advances in and Future Challenges for Mesoscopic Hydrodynamic Modelling of Complex Wetting // Colloids Surf., A. 2018. V. 553. P. 487–495. https://doi.org/10.1016/j.colsurfa.2018.05.049
Shchekin A.K., Lebedeva T.S., Suh D. The Overlapping Surface Layers and the Disjoining Pressure in a Small Droplet // Colloids Surf., A. 2019. V. 574. P. 78–85. https://doi.org/10.1016/j.colsurfa.2019.04.071
Kukushkin S.A., Osipov A.V. Kinetics of First-Order Phase Transitions in the Asymptotic Stage // J. Exp. Theor. Phys. 1998. V. 86. № 6. P. 1201–1208. https://doi.org/10.1134/1.558591
Slezov V.V., Schmelzer J. Kinetics of Formation and Growth of a New Phase with a Definite Stoichiometric Composition // J. Phys. Chem. Solids. 1994. V. 55. № 3. P. 243–251. https://doi.org/10.1016/0022-3697(94)90139-2
Nowak W.B., Keukelaar R., Wang W., Nyaiesh A.R. Diffusion of Nickel Through Titanium Nitride Films // J. Vac. Sci. Technol., A. 1985. V. 3. № 6. P. 2242–2245. https://doi.org/10.1116/1.572900