Structure and Phase Formation in Arc PVD Zr–B–Si–C–Ti–(N) Coatings

D. S. Belov; Белов Д. С.; I. V. Blinkov; Блинков И. В.; V. S. Sergevnin; Сергевнин В. С.; A. V.  Chernogor; Черногор А. В.; A. P. Demirov; Демиров А. П.; A. M. Polyanskii; Полянский А. М.

doi:10.31857/S0002337X23020033

Structure and Phase Formation in Arc PVD Zr–B–Si–C–Ti–(N) Coatings

Authors: Belov D.S.¹, Blinkov I.V.¹, Sergevnin V.S.¹, Chernogor A.V.¹, Demirov A.P.¹, Polyanskii A.M.²
Affiliations:
1. Moscow Institute of Steel and Alloys (National University of Science and Technology), 119049, Moscow, Russia
2. Glushko NPO Energomash, 141400, Khimki, Moscow oblast, Russia
Issue: Vol 59, No 2 (2023)
Pages: 162-168
Section: Articles
URL: https://journals.rcsi.science/0002-337X/article/view/140125
DOI: https://doi.org/10.31857/S0002337X23020033
EDN: https://elibrary.ru/YCNWKG
ID: 140125

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Abstract

Zr–B–Si–C–Ti and Zr–B–Si–C–Ti–N coatings have been produced for the first time by an arc physical vapor deposition process in a residual argon + nitrogen atmosphere. The Zr–B–Si–C–Ti coating had an amorphous–nanocrystalline structure. Nanocrystallites were formed in the Ti–B–C system, and the amorphous component of the material was formed by Zr–B–C and Si–C phases. The coating of the latter system had a predominantly amorphous structure (amorphous content of ~85–93%) based on titanium nitride with Ti–B and Ti–C bonds, zirconium carboboronitride (Zrx(C,N,B)y), zirconium boride, and silicon carbonitride.

Keywords

cathodic arc physical vapor deposition coatings, amorphous structure, nanocrystalline structure, carbide, carbonitride, carboboride, carboboronitride, phase formation, binding energy of elements, thermal stability of structure

References

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