Using the differential method of measurement to control the accuracy of precision angle measuring structures

Аннотация

Specific features of monitoring metrological parameters of optical scales, limbs, or code disks are considered. A concept of building an intelligent mechatronic module on the air bearing basis for a high-performance angle measuring machine is proposed. The result is achieved by using the differential method of measurement in the mechatronic module design. This method allows one to determine the contribution of the measuring setup to the resulting error of structures.