Physical and mechanical properties of (Ti–Zr–Nb)N coatings fabricated by vacuum-arc deposition

详细

By vacuum-arc evaporation of a multielement Ti + Zr + Nb cathode in a nitrogen atmosphere, (Ti–Zr–Nb)N coatings are deposited on steel substrates. The coatings are characterized by a columnar structure with nanosized (10–63 nm) crystallites of the main FCC nitride phase (Ti–Zr–Nb)N. At maximal nitrogen pressure P_N = 4 × 10^–3 Torr, an axial structure of growth of (Ti–Zr–Nb)N crystals with [111] axis is formed, and a maximal coating microhardness value about 45 GPa and adhesion strength of 67 GPa are reached. The friction factor for the system of “coating–Al₂O₃” is 1.1. Such coatings seem to having prospects as protective ones for couples of friction and cutting tools.