Simulation of Translational Vibrations Effect on Torque-to-Balance RR-Type MEMS Gyroscope

详细

A mathematical model of torque-to-balance MEMS gyroscope with a drive mode in plane is developed. The model considers compensational control loop, proof-mass dynamics, electromechanical nonlinear effects in capacitive transducers and the inequality of their parameters. The response of the resulting system to translational vibrations is investigated. Qualitative coincidence of simulation results with experimental data is obtained. A way of increasing vibration reliability is highlighted.