MEMS RR-type gyro with a moving electrode

Аннотация

A MEMS RR-type gyro design, immune to translational vibration and constant linear accelerations, is proposed. The gyro mechanical performance is improved through arranging the electrodes of the torquer and angular sensor on elastic suspension of certain stiffness. Design features of the proposed gyro are described, analytical formulas relating the natural frequencies of inertial body suspension and the electrode are given, along with the results of mathematical modeling of gyro dynamics on a vibrating foundation.